Vacuum Equipment Classification and Characteristics

Vacuum equipment products can be divided into five categories:


  1. Vacuum Obtaining Equipment

A device that generates, improves or maintains a vacuum. It includes a variety of vacuum pumps and vacuum systems to obtain rough vacuum, low vacuum, medium vacuum, high vacuum and ultra-high vacuum.

  • Mechanical vacuum pump: rotary vane vacuum pump, reciprocating vacuum pump, rotary piston pump, roots vacuum pump, molecular pump and liquid ring vacuum pump, etc.

  • Vapor flow vacuum pump: water vapor jet pump, oil booster pump and oil diffusion pump, etc.

  • Gas trap vacuum pump: titanium sputtering ion pump, cryogenic pump, molecular sieve adsorption pump and zirconium-aluminum getter pump, etc.

  • Vacuum system: that is, various systems composed of components such as vacuum generating device, vacuum measuring device and vacuum controlling device. 


  1. Vacuum Application Equipment

In a vacuum environment (gas state below one atmospheric pressure), various equipment is being used.

  • Vacuum coating machine: evaporation coating machine, magnetron sputtering coating machine, ion coating machine and plasma chemical deposition device, etc.

  • Vacuum smelting furnace: resistance furnace, electron beam furnace, electric arc furnace, induction furnace and single crystal furnace, etc.

  • Vacuum heat treatment furnace: quenching furnace, tempering furnace, annealing furnace, carburizing furnace, nit riding furnace and metalizing furnace, etc.

  • Other vacuum equipment: freeze drying equipment, distillation equipment, purification equipment, dipping equipment, fruit and vegetable preservation equipment, transportation equipment, space simulation equipment, packaging machine and molten steel degassing device, etc.


  1. Vacuum Measuring Instrument

An instrument that measures the pressure of gases and vapors below one atmospheric pressure.

  • Low vacuum gauge (measurement range 105---102Pa).

  • Medium vacuum gauge (measurement range l02-l0-1Pa).

  • High vacuum gauge (measurement range l0-1-10-5Pa).

  • Ultra-high vacuum gauge (measurement range < 10-5Pa).


  1. Vacuum Leak Detector

An instrument that detects the position or leak rate of leaks in vacuum systems or components. This include high-frequency spark leak detectors, halogen leak detectors and helium mass spectrometer leak detectors. 


  1. Vacuum Valve

In the vacuum system, it is used to adjust the flow, cut off or connect the pipeline. This include flapper valve, solenoid valve, diaphragm valve and regulating valve, etc.


If you want to learn more news about pumps and vacuum industry, please read these blog posts.


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