Rotary Vane Vacuum Pump for Semiconductor

Rotary vane vacuum pump is clean and pollution-free, and has a wide range of pumping speed and good energy saving, stability, easy maintenance and other advantages. It is widely used in the semiconductor industry.


Vacuum pump for semiconductor process is mainly used in evaporation, sputtering, PECVD, vacuum dry etching, vacuum adsorption, testing equipment, vacuum cleaning and other bonding processes.  


Semiconductor materials can be divided into two categories: elemental semiconductors and compound semiconductors. Elemental semiconductors refer to semiconductors formed by single elements of silicon and germanium, and compounds refer to semiconductors formed by compounds such as gallium arsenide and indium phosphide.

rotary vane vacuum pump     rotary vane vacuum pump


In the semiconductor manufacturing process, flammable, explosive and toxic substances and gases are easily generated, which will pose a threat to production and personnel safety. Therefore, several safety matters that need to be paid attention to when the rotary vane vacuum pump is applied in the semiconductor process.


  1. Regularly clean the rotary vane vacuum pump and other accessories, filters and pipes to avoid overpressure.

When the rotary vane vacuum pump is used in semiconductors, the process of extracting the medium passes through the reaction chamber and the vacuum pump, and its composition may be extremely complex. For example, SiH4 and O2 form SiO2 at the pump port, and TiCl4 hydrolyzes to form HCl.

If it is an oil-sealed mechanical pump, these gases substances may also react with pump oil. These changes assume the formation of particles, condensables or corrosive media, which may block the vacuum pump or piping system, affect the performance of the vacuum pump, cause pressure rise or overpressure, and the danger mentioned before is also greater. Therefore, it is necessary to clean in time and set up filtering equipment when necessary.  


  1. Effectively dilute the concentration of harmful gases.

Semiconductors are prone to produce flammable, explosive, and poisonous harmful gases. Therefore, in the process of vacuum pump application, when extracting these media, it is necessary to prevent some uncontrollable reactions in the vacuum pump or during the exhaust process.

For example, substances such as SiH4, PH3, AsH3, B2H6, etc., will cause combustion or even explosion when they come into contact with air or oxygen. Combustion will also occur when the mixing ratio of hydrogen in the air reaches a certain level and temperature. These all depend on the amount of the substance and the relationship with the pressure and temperature of the environment.

Therefore, when pumping these media, vacuum pumps need to use inert gases such as nitrogen to dilute these gases to a safe range under the current conditions before compression.  


  1. Pay attention to the concentration of oxygen.

Oxygen in the air can also burn and explode if the concentration is too high. Therefore, in some cases, it is necessary to pay attention to the concentration of oxygen, and use inert gas to dilute to prevent the concentration from being too high. If it is an oil-sealed mechanical pump, it may also be necessary to use some inert vacuum pump oil compatible with oxygen, and replace the oil filter and oil in time.  


  1. Prevent the temperature from being too high.

In the application of semiconductors, there are many harmful gases, and whether it is a dry vacuum pump or an oil-sealed mechanical pump, the temperature in the pump chamber is too high, and flammable, explosive and toxic gases are prone to danger at high temperatures.  


The above four aspects are the most important safety matters in the application of rotary vane vacuum pump in semiconductor process. If we want to work more smoothly, we should extend the service life of the vacuum pump, and strive to coordinate and balance to ensure efficiency and safety.


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