Rotary Vane Vacuum Pump for Thin Film Technology

Thin-film technology is mostly invisible but efficient, and its applications include:

Coating on architectural glass for thermal and radiation protection.

Coating on spectacle lenses to prevent glare and scratches.

Coating of discs and cold light lamps to enhance the reflection of light and rays.

Coating on tools and bearings to avoid wear etc.

None of these would be possible without the use of rotary vane vacuum pumps.


Film classification (by function and its application areas):


  • Electrical thin film

Conductive materials and dielectric film materials used in semiconductor devices and integrated circuits

Superconducting thin film

Functional thin films used in optoelectronic devices

Thin-film sensitive elements and solid-state sensors

Thin-film resistors, thin-film capacitors, thin-film resistor-capacitor networks and hybrid integrated circuits

Thin film solar cells

Flat panel display device

SAW filter made of ZnO, AIN and other thin films

Magnetic recording film and thin film magnetic head 


  • Optical film

Anti-reflection film, reflective film, beam splitter, filter.

Reflective mirror and cold light mirror film used for illumination light source.

Coated glass used in buildings, automobiles and other vehicles.

Optical storage films in compact discs and compact discs.

Dielectric and semiconductor thin films for integrated optical components.

  • Hard film, corrosion-resistant film, lubricating film  

  • Organic Molecular Films  

  • Decorative film  

  • Packaging film 

rotary vane vacuum pump     rotary vane vacuum pump


The thin film is a special form of matter. Because of its small size in the specific direction of thickness, it is only a microscopically measurable amount, and the continuity of the material is interrupted due to the existence of the surface and interface in the thickness direction. As a result, thin-film materials have unique properties that are different from bulk materials.

There are many preparation methods for thin films, such as vapor phase growth method, liquid phase growth method (or gas and liquid phase epitaxy method), oxidation method, diffusion and coating method, electroplating method, etc., and each film forming method can be divided into several methods.

Thin film technology covers a wide range, including film forming technology represented by physical vapor deposition and chemical vapor deposition, microfabrication technology represented by ion beam etching, monitoring technology of film forming and etching process, thin film analysis, evaluation and testing technology, etc.

Rotary vane vacuum pumps have been widely used in various fields such as electronic components, integrated optics, electronic technology, infrared technology, laser technology, aerospace technology and optical instruments. They have not only become an independent application technology, but also become a material surface and important means to modify and improve the level of certain processes. 


In addition to the application in thin film technology, our rotary vane vacuum pumps are also often used in:

Environmental friendly processes that are conducive to replacing those processes that are harmful to the environment.

Measuring instruments and leak detectors

Food vacuum packaging

Eco-friendly refrigerator

Air conditioner

Production of high-purity and high-strength metals

Light bulbs and color picture tubes

Flat panel display manufacturing


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